Banerjee, R.; Sperling, E. A.; Thompson, G. B.; Fraser, H. L.; Bose, S.; Ayyub, P.
(2003-04-09)
High-purity nanocrystalline niobium (Nb) thin films have been deposited using high-pressure
magnetron sputter deposition. Increasing the pressure of the sputtering gas during deposition has
systematically led to reduced ...