Single crystalline magnesium oxide MgO nanowires exhibiting a square cross section have been grown on 001-oriented MgO and Si substrates using the vapor-liquid-solid growth mechanism. While the nanowires grow vertically aligned on MgO, they display random orientations on the silicon substrate. For growth on MgO substrates, the selective placement and density of the nanowires can be controlled by using electron beam lithography for prepatterning the gold catalyst layer. The nanowire samples have been characterized using field-emission scanning electron microscopy and transmission electron microscopy. The described process for selective placement of the nanowires is attractive for their use as templates for coaxial coatings and also for their manipulation for potential device fabrication.