Interrelationship of in Situ Growth Stress Evolution and Phase Transformations in Ti/W Multilayered Thin Films

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dc.contributor.author Thompson, Gregory B.
dc.contributor.author Wan, Li
dc.contributor.author Yu, Xiao-Xiang
dc.contributor.author Zhou, Xuyang
dc.date.accessioned 2018-11-12T21:36:14Z
dc.date.available 2018-11-12T21:36:14Z
dc.date.issued 2016-06-24
dc.identifier.citation Li Wan, et al. (2016): Interrelationship of in Situ Growth Stress Evolution and Phase Transformations in Ti/W Multilayered Thin Films. Applied Physics Letters, 119(24). en_US
dc.identifier.uri http://ir.ua.edu/handle/123456789/4868
dc.description.abstract This paper addresses the in situ growth stress evolution and phase transformation of bcc to hcp Ti in Ti/W multilayered thin films. A series of equal layer thicknesses from 20 nm to 1 nm were deposited. As the bilayer thickness reduced, the overall film stress became less compressive until the Ti transformed from hcp (at the larger layer thicknesses) to bcc in the 1 nm/1 nm multilayer. The pseudomorphic bcc stabilization resulted in a recovery of the compressive stress to values near that for the bulk phase stabilized for the 5 nm/5 nm multilayer. A discernable change in stress slope was noted for the bcc to hcp Ti transition as a function of Ti layer thickness. The stress states for each film, during film growth, are rationalized by the lattice matching of the phase with the growth surface. These results are coupled to a molecular dynamics deposition simulation which revealed good agreement with the experimentally observed transformation thickness. en_US
dc.format.mimetype application/pdf en_US
dc.subject Compressive stress en_US
dc.subject Transmission electron microscopy en_US
dc.subject Microscopy en_US
dc.subject Stress measurement en_US
dc.subject Phase identification en_US
dc.subject Thin films en_US
dc.subject Molecular dynamics en_US
dc.subject Crystal structure en_US
dc.subject Phase transitions en_US
dc.subject Crystallographic defects en_US
dc.title Interrelationship of in Situ Growth Stress Evolution and Phase Transformations in Ti/W Multilayered Thin Films en_US
dc.type text en_US


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